Planar Integrated Sensors on Waveguides for sensing applications
نویسندگان
چکیده
We investigate the use of a metallic nano-cavity on dielectric waveguides for sensing applications. Nowadays the fabrication of metallic structures featured by challenging dimensions is feasible thanks to the most recent technologies such as EBeam Lithography (EBL) and lift-off [1]. We propose here to study the simulation, fabrication and characterization of such structures at the telecom wavelength (λ=1.55 μm).
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